Application of thin silicon films to closed-tube Si and Zn...

Application of thin silicon films to closed-tube Si and Zn diffusion in GaAs and AlxGa1−xAs

Vawter, G. Allen, Omura, Etsuji, Wu, X. S., Merz, James L., Coldren, Larry, Hu, Evelyn
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Volume:
63
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.340331
File:
PDF, 1.04 MB
english, 1988
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