Study on Zr-silicate interfacial layer of ZrO[sub 2] metal-insulator-semiconductor structure
Yamaguchi, Takeshi, Satake, Hideki, Fukushima, Noburu, Toriumi, AkiraVolume:
80
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1454231
File:
PDF, 521 KB
english, 2002