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X-Ray Lithography: A Complementary Technique to Electron Beam Lithography
Smith, Henry I., Spears, D. L., Bernacki, S. E.Volume:
10
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.1318514
Date:
November, 1973
File:
PDF, 702 KB
english, 1973