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Modelling the reaction behavior in reactive multilayer systems on substrates used for wafer bonding
Masser, Robin, Braeuer, Joerg, Gessner, ThomasVolume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4885457
Date:
June, 2014
File:
PDF, 1.85 MB
english, 2014