In situ real time Auger analyses during oxides and alloy...

In situ real time Auger analyses during oxides and alloy growth using a new spectrometer design

Staib, Philippe G.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3562195
File:
PDF, 992 KB
english, 2011
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