Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 3
In situ real time Auger analyses during oxides and alloy growth using a new spectrometer design
Staib, Philippe G.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3562195
File:
PDF, 992 KB
english, 2011