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[IEEE 2010 International Conference on Electrical and Control Engineering (ICECE) - Wuhan, China (2010.06.25-2010.06.27)] 2010 International Conference on Electrical and Control Engineering - MIMO Identification of 3 DOF Planar Micro Positioning Stage
Jin, Yang, Wensheng, Yin, Guanghong, DuanYear:
2010
DOI:
10.1109/icece.2010.316
File:
PDF, 575 KB
2010