Polysilicon films of high photoresponse, obtained by vacuum annealing of aluminum capped hydrogenated amorphous silicon
Sridhar, Nagarajan, Chung, D. D. L., Anderson, W. A., Coleman, J.Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360769
File:
PDF, 1.35 MB
english, 1995