Reactive deposition of compounds by a cavity-hollow cathode direct current sputtering system
Kazemeini, Mehdi H., Berezin, Alexander A.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1312373
File:
PDF, 790 KB
english, 2000