Solid-phase crystallization behaviors of in situ...

Solid-phase crystallization behaviors of in situ phosphorous-doped amorphous silicon films deposited using Si[sub 2]H[sub 6] and PH[sub 3]

Yokoyama, Shigeyuki, Onizuka, Hisayuki, Yoshizawa, Yuki, Kuwano, Hiroshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1582234
File:
PDF, 293 KB
english, 2003
Conversion to is in progress
Conversion to is failed