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Study of silicon surfaces bombarded with noble gas ions in an electron cyclotron resonance plasma
Day, M. E., Delfino, M., Tsai, W., Bivas, A., Ritz, K. N.Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354261
File:
PDF, 1.39 MB
english, 1993