Depth profile of disorders in silicon induced by O+ and Si+ ion bombardments
Kazuo Shin, Motoyuki Suzuki, Makoto Okazaki, Ikuji Takagi, Kouji YoshidaVolume:
46
Year:
1995
Language:
english
Pages:
2
DOI:
10.1016/0969-8043(95)00083-6
File:
PDF, 114 KB
english, 1995