Elution of residual ions with etching of heavy ion-injected polyimide
Yoshihide Komaki, Niro Ishikawa, Tsutomu Sakurai, Yasuyo MatsumotoVolume:
23
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/1350-4487(94)90009-4
File:
PDF, 448 KB
english, 1994