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A novel MEMS electromagnetic actuator with large displacement
Lv, Xingdong, Wei, Weiwei, Mao, Xu, Chen, Yu, Yang, Jinling, Yang, FuhuaVolume:
221
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.10.028
Date:
January, 2015
File:
PDF, 2.10 MB
english, 2015