Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1988 / 3 Vol. 6; Iss. 2
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A new ultrafine groove fabrication method utilizing electron cyclotron resonance plasma deposition and reactive ion etching
Ohki, ShigehisaVolume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.584064
Date:
March, 1988
File:
PDF, 737 KB
english, 1988