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Ion energy distribution and optical measurements in high-density, inductively coupled C[sub 4]F[sub 6] discharges
Benck, Eric C., Goyette, Amanda, Wang, YichengVolume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1586978
File:
PDF, 461 KB
english, 2003