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[IEEE 2013 IEEE 13th International Conference on Nanotechnology (IEEE-NANO) - Beijing, China (2013.08.5-2013.08.8)] 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) - Multi-functional MEMS/NEMS for nanometrology applications
Hao, Ling, Gallop, John, Stewart, Mark, Lees, Kevin, Chen, JieYear:
2013
Language:
english
DOI:
10.1109/nano.2013.6721047
File:
PDF, 922 KB
english, 2013