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Structural and electrical properties of SrTiO[sub 3] thin films prepared by plasma enhanced metalorganic chemical vapor deposition
Hahn, Y. B., Kim, D. O.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581714
File:
PDF, 625 KB
english, 1999