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[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - CMOS-Based High-Density Silicon Microprobe Array for Electronic Depth Control in Neural Recording
Seidl, K., Herwik, S., Nurcahyo, Y., Torfs, T., Keller, M., Schuttler, M., Neves, H., Stieglitz, T., Paul, O., Ruther, P.Year:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805361
File:
PDF, 4.71 MB
english, 2009