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Structure of amorphous hydrogenated carbon films prepared by radio frequency plasma enhanced chemical vapor deposition. An analogy with the structure zone model developed for metals
B. Dumay, E. Finot, M. Theobald, O. Legaie, J. Durand, P. Baclet, J. P. GoudonnetYear:
2002
Language:
english
DOI:
10.1063/1.1518795
File:
PDF, 1.62 MB
english, 2002