Ion source with rf autogenerating beam-plasma discharge

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Ion source with rf autogenerating beam-plasma discharge

I. V. Vizgalov, S. K. Dimitrov, Y. V. Chernyatjev
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Year:
1992
Language:
english
DOI:
10.1063/1.1142894
File:
PDF, 658 KB
english, 1992
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