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Effect of deposition temperature on surface acoustic wave velocity of aluminum nitride films determined by Brillouin spectroscopy
Assouar, M. B., Riobóo, R. J. Jiménez, Vila, M., Alnot, P.Volume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2121927
File:
PDF, 485 KB
english, 2005