Electrical characteristics of buried-Pt Schottky contacts...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 4

Electrical characteristics of buried-Pt Schottky contacts on thin InP/InAlAs heterostructures

Shin, Seung Heon, Song, Jong-In, Jang, Jae-Hyung, Park, Sang-Duk, Bae, Jeong-Woon, Yeom, Geun-Young, Kim, Tae-Woo
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3610171
File:
PDF, 755 KB
english, 2011
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