Ellipsometric in situ measurement of oxidation kinetics and thickness of (C2–C20) alkylsilyl (sub)monolayers
Prunici, Pavel, Hess, PeterVolume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2832439
File:
PDF, 496 KB
english, 2008