![](/img/cover-not-exists.png)
Effect of low-temperature preannealing on laser-annealed p[sup +]/n ultrashallow junctions
Baek, Sungkweon, Jang, Taesung, Hwang, HyunsangVolume:
80
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1463702
File:
PDF, 419 KB
english, 2002