Pt/Ti/p-In0.53Ga0.47As low-resistance nonalloyed ohmic...

Applied Physics Letters 1989 Vol. 54; Iss. 23

Pt/Ti/p-In0.53Ga0.47As low-resistance nonalloyed ohmic contact formed by rapid thermal processing

Katz, A., Dautremont-Smith, W. C., Chu, S. N. G., Thomas, P. M., Koszi, L. A., Lee, J. W., Riggs, V. G., Brown, R. L., Napholtz, S. G., Zilko, J. L., Lahav, A.
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Volume:
54
Year:
1989
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.101110
File:
PDF, 657 KB
english, 1989
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