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Investigations of a method for determining pumping speed and sorption capacity of nonevaporable getters based on in situ calibrated throughput
Erjavec, Bojan, Setina, JanezVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3626535
File:
PDF, 847 KB
english, 2011