Role of hydrogen dilution and diborane doping on the growth mechanism of p-type microcrystalline silicon films prepared by photochemical vapor deposition
Ghosh, Sukriti, De, Abhijit, Ray, Swati, Barua, A. K.Volume:
71
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.350576
File:
PDF, 999 KB
english, 1992