Short-gas-residence-time electron cyclotron resonance...

Short-gas-residence-time electron cyclotron resonance plasma etching

Tsujimoto, Kazunori
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.579297
Date:
July, 1994
File:
PDF, 946 KB
english, 1994
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