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Effects of thermal annealing of W/SiO[sub 2] multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes
Yim, Munhyuk, Kim, Dong-Hyun, Chai, Dongkyu, Yoon, GiwanVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1690248
File:
PDF, 1.02 MB
english, 2004