Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 4
Wafer-scale nanopatterning using electrodeposition
Lee, Leung Kway, Ku, Pei-ChengVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3466883
File:
PDF, 798 KB
english, 2010