Wafer-scale nanopatterning using electrodeposition

Wafer-scale nanopatterning using electrodeposition

Lee, Leung Kway, Ku, Pei-Cheng
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3466883
File:
PDF, 798 KB
english, 2010
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