Cl atom recombination on silicon oxy-chloride layers...

Cl atom recombination on silicon oxy-chloride layers deposited on chamber walls in chlorine–oxygen plasmas

Khare, Rohit, Srivastava, Ashutosh, Donnelly, Vincent M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4742322
File:
PDF, 1.49 MB
english, 2012
Conversion to is in progress
Conversion to is failed