Radiation Damage in SiO 2 /Si Induced by VUV Photons
Yunogami, Takashi, Mizutani, Tatsumi, Suzuki, Keizo, Nishimatsu, ShigeruVolume:
28
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.28.2172
Date:
October, 1989
File:
PDF, 710 KB
1989