X-ray photoelectron spectroscopy characterization of the oxidation of electroplated and sputter deposited copper surfaces
Apen, ElizabethVolume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581264
Date:
May, 1998
File:
PDF, 397 KB
english, 1998