Determination of the multiple local properties of thin...

Review of Scientific Instruments 2014 / 09 Vol. 85; Iss. 9

Determination of the multiple local properties of thin layer with high lateral resolution by scanning acoustic microscopy

Bai, Xiaolong, Sun, Zeqing, Sun, Anyu, Chen, Jian, Ju, Bing-Feng
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4894261
Date:
September, 2014
File:
PDF, 1.33 MB
english, 2014
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