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Nano-oxidation of silicon nitride films with an atomic force microscope: Chemical mapping, kinetics, and applications
Chien, F. S.-S., Chou, Y. C., Chen, T. T., Hsieh, W.-F., Chao, T.-S., Gwo, S.Volume:
89
Year:
2001
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1339212
File:
PDF, 958 KB
english, 2001