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Microscale lithography via channel stamping: Relationships...

Microscale lithography via channel stamping: Relationships between capillarity, channel filling, and debonding

Moran, P. M., Lange, F. F.
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Volume:
74
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.123541
File:
PDF, 441 KB
english, 1999
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