High conductivity polycrystalline silicon obtained by...

High conductivity polycrystalline silicon obtained by molecular beam deposition

Delage, S. L., Jeng, S.-J., Jousse, D., Iyer, S. S.
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Volume:
52
Year:
1988
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.99199
File:
PDF, 709 KB
english, 1988
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