[IEEE 1998 International Semiconductor Conference. CAS'98 Proceedings - Sinaia, Romania (6-10 Oct. 1998)] 1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351) - Physical-optical properties of LPCVD amorphous silicon rich-nitride and oxynitride
Modreanu, M., Tomozeiu, N., Cosmin, P., Gartner, M.Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/smicnd.1998.732342
File:
PDF, 306 KB
english, 1998