![](/img/cover-not-exists.png)
Summary Abstract: X-ray photoelectron spectroscopy surface charge buildup used to study residue in deep features on integrated circuits
Thomas, J. H.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575649
Date:
May, 1988
File:
PDF, 317 KB
english, 1988