Anisotropic growth of chromium films during sputter...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 4

Anisotropic growth of chromium films during sputter deposition on substrates in planetary motion

Janssen, G. C. A. M., Alkemade, P. F. A., Sivel, V. G. M., Grachev, S. Yu., Kamminga, J.-D.
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1766035
File:
PDF, 797 KB
english, 2004
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