Energy-selective reaction of the hydrogen-passivated Si surface with carbon tetrafluoride via dissociative electron attachment
Di, W., Rowntree, P., Sanche, L.Volume:
52
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.52.16618
Date:
December, 1995
File:
PDF, 213 KB
english, 1995