In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of...

In Situ Two-Step Plasma Enhanced Atomic Layer Deposition of Ru/RuNx Barriers for Seedless Copper Electroplating

Chang, Chih-Chieh, Pan, Fu-Ming
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Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3554734
File:
PDF, 2.45 MB
english, 2011
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