Dry etching of (Pb,Sr)TiO[sub 3] thin films using...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2005 Vol. 23; Iss. 4

Dry etching of (Pb,Sr)TiO[sub 3] thin films using inductively coupled plasma

Kim, Gwan-Ha, Kim, Jong-Sik, Kim, Kyoung-Tae, Kim, Dong-Pyo, Kim, Chang-Il
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1881653
File:
PDF, 421 KB
english, 2005
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