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Physical structures of SiO[sub 2] ultrathin films probed by grazing incidence x-ray reflectivity
Azuma, Yasushi, Fan, Jiangwei, Kojima, Isao, Wei, ShiqiangVolume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1941469
File:
PDF, 303 KB
english, 2005