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Radical dynamics in unstable CF[sub 4] inductive discharges
Chabert, P., Abada, H., Booth, J.-P., Lieberman, M. A.Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1578175
File:
PDF, 436 KB
english, 2003