Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 4
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Optical study of sol-gel processed ZrO[sub 2]/Si films by spectroscopic ellipsometry
Yoon, J. J., Lee, S. M., Kim, T. J., Hwang, S. Y., Diware, M., Kim, Y. D., Hwang, S. M., Joo, J.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3607598
File:
PDF, 534 KB
english, 2011