The effects of oxygen plasma and humidity on surface...

The effects of oxygen plasma and humidity on surface roughness, water contact angle and hardness of silicon, silicon dioxide and glass

Alam, A U, Howlader, M M R, Deen, M J
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035010
Date:
March, 2014
File:
PDF, 1.96 MB
english, 2014
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