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The effects of oxygen plasma and humidity on surface roughness, water contact angle and hardness of silicon, silicon dioxide and glass
Alam, A U, Howlader, M M R, Deen, M JVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035010
Date:
March, 2014
File:
PDF, 1.96 MB
english, 2014