The application of in situ monitor of extremely rarefied...

The application of in situ monitor of extremely rarefied particle clouds grown thermally above wafers by using laser light scattering method to the development of the mass-production condition of the tungsten thermal chemical vapor deposition

Ito, Natsuko, Moriya, Tsuyoshi, Uesugi, Fumihiko, Moriya, Shuji, Aomori, Masaru, Kato, Yoshinori, Tachibana, Mitsuhiro
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1365127
File:
PDF, 561 KB
english, 2001
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