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The application of in situ monitor of extremely rarefied particle clouds grown thermally above wafers by using laser light scattering method to the development of the mass-production condition of the tungsten thermal chemical vapor deposition
Ito, Natsuko, Moriya, Tsuyoshi, Uesugi, Fumihiko, Moriya, Shuji, Aomori, Masaru, Kato, Yoshinori, Tachibana, MitsuhiroVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1365127
File:
PDF, 561 KB
english, 2001