[IEEE 2006 European Solid-State Device Research Conference - Montreux, Switzerland (2006.09.19-2006.09.21)] 2006 European Solid-State Device Research Conference - Highly Reliable TiN/ZrO2/TiN 3D Stacked Capacitors for 45 nm Embedded DRAM Technologies
Berthelot, A., Caillat, C., Huard, V., Barnola, S., Boeck, B., Del-Puppo, H., Emonet, N., Lalanne, F.Year:
2006
Language:
english
DOI:
10.1109/essder.2006.307708
File:
PDF, 1.26 MB
english, 2006