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Study of the atomic models of three donorlike defects in silicon metal-oxide-semiconductor structures from their gate material and process dependencies
Sah, Chih-Tang, Sun, Jack Yuan-Chen, Tzou, Joseph Jeng-TaoVolume:
55
Year:
1984
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.333411
File:
PDF, 2.03 MB
english, 1984